Ozone Gas Delivery System-Semi Conductor-Products-Qingdao Guolin Technology Group Co., Ltd.

Ozone Gas Delivery System

Ozone gas delivery system can produce super pure and reliable ozone gas. In a clean semiconductor environment, thin film deposition processes such as atomic layer deposition (ALD) and etching (ALE) are realized by ozone gas reaction. High purity and high concentration ozone gas can produce higher film density, so as to improve the output, performance and reliability of products.

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Product Features

High ozone concentration

High gas flow

Using ultrapure generation technology

Nitrogen-free blending technology

Related Information

Qingdao Guolin Technology Group Co.,Ltd. Brochure

Customer
Service

400-653-2616

Customer Service Center

400-653-2616
7×24 year-round service

2 hours response, 24 hours at the scene.(In China mainland)
Active intelligent service

Complete customer profiles providing proactive services
Expert considerate service

We have long-term cooperation with experts of ozone technology.
Upgrade

Cooperate with client to upgrade relevant equipment in the ozone generation system.

Qingdao Guolin Technology Group Co., Ltd. (hereinafter referred to as Guolin Technology) was established in 1994, which is a high-tech enterprise engaged in researching, manufacturing and trading. As a professional expert of Ozone solution, Guolin Technology invests itself in ozone generation mechanism study, ozone equipment design and manufacture, ozone application engineering design, installation, commissioning, operation and maintenance. It has an ozone equipment production base covering an area of more than 130 acres, which is making Guolin Technology become the leading enterprise in China's ozone industry. Guolin Technology (Stock code: 300786.SZ) was officially listed on the GEM of Shenzhen Stock Exchange on July 23, 2019, becoming the first listed enterprise of ozone industry.